PRODUCT > XP COMDEL
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PHOTO MODEL INPUT OUTPUT Safety

ESC 시리즈
  
24VDC Electrostatic Chuck Power 1kVDC ~ 10kVDC


CH 시리즈
  
1/3Φ 208/400/480VAC RF Power Supply 400k/2M/13.56M/ 27.12M/40.68M/60MHz


CDX 시리즈
  
3Φ 208/400/480VAC Dual RF Power Supply 400k/2M/13,56M/ 27.12M/40.68M/60MHz


CB600A 시리즈
  
1Φ 208VAC High Freq. RF Power Supply 400k/2M/13,56M/ 27.12M/40.68M/60MHz


CB3000 시리즈
  
3Φ 208/400/480VAC High Freq. RF Power Supply 13.56M/27.12M/40.68M/60MHz


CB5000 시리즈
  
3Φ 208/400/480VAC High Freq. RF Power Supply 13.56M/27.12M/40.68M/60MHz


CLB 시리즈
  
3Φ 208/400/480VAC Low Freq. RF Power Supply 20kHz ~ 2MHz